1991 electronic materials conference : selected papers, Boulder, ColoradoPANG, STELLA W.Journal of electronic materials. 1992, Vol 21, Num 1, pp 1-86, issn 0361-5235Conference Proceedings

Micromachining and microfabrication process technology III (Austin TX, 29-30 September 1997)Shih-Chia Chang; Pang, Stella W.SPIE proceedings series. 1997, isbn 0-8194-2655-5, IX, 310 p, isbn 0-8194-2655-5Conference Proceedings

Examination of barrier layers for lead zirconate titanate thin filmsMADSEN, L. D; WEAVER, L.Journal of electronic materials. 1992, Vol 21, Num 1, pp 93-97, issn 0361-5235Conference Paper

Design of bulk micromachined suspensionsFANG, W.SPIE proceedings series. 1997, pp 262-269, isbn 0-8194-2655-5Conference Paper

Optimal growth interrupts for very high quality InGaAs(P)/InP superlattices grown by MOVPELANDGREN, G; WALLIN, J; PELLEGRINO, S et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 105-108, issn 0361-5235Conference Paper

Microfabrication by through-mask electrochemical micromachiningDATTA, M.SPIE proceedings series. 1997, pp 178-184, isbn 0-8194-2655-5Conference Paper

X-ray diffraction observation of surface damage in chemical-mechanical polished gallium arsenideWANG, V. S; MATYI, R. J.Journal of electronic materials. 1992, Vol 21, Num 1, pp 23-31, issn 0361-5235Conference Paper

Electrical characterization of very-low energy (0-30 eV) Cl-radical/ion-beam-etching induced damage using two-dimensional electron gas heterostructuresIDE, Y; KOHMOTO, S; ASAKAWA, K et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 3-7, issn 0361-5235Conference Paper

Protein-assisted stretching and immobilization of DNA molecules in a microchannelRAM DUKKIPATI, Venkat; JI HOON KIM; PANG, Stella W et al.Nano letters (Print). 2006, Vol 6, Num 11, pp 2499-2504, issn 1530-6984, 6 p.Article

Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography systemTIAN, Wei-Cheng; CHAN, Helena K. L; LU, Chia-Jung et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 3, pp 498-507, issn 1057-7157, 10 p.Article

Precise micro-nanomachining for advanced sensorsESASHI, M; ONO, T; MINAMI, K et al.SPIE proceedings series. 1997, pp 44-55, isbn 0-8194-2655-5Conference Paper

Ultraprecision microelectroforming of metals and metal alloysLÖWE, H; EHRFELD, W; DIEBEL, J et al.SPIE proceedings series. 1997, pp 168-175, isbn 0-8194-2655-5Conference Paper

Wet chemical isotropic etching procedures of silicon : a possibility for the production of deep structured microcomponentsSCHWESINGER, N; ALBRECHT, A.SPIE proceedings series. 1997, pp 72-79, isbn 0-8194-2655-5Conference Paper

A deep level transient spectroscopy study of rapid thermal annealed arsenic implanted siliconBECK, S. E; JACCODINE, R. J; CLARK, C et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 125-128, issn 0361-5235Conference Paper

Rapid thermal chemical vapor deposition of in-situ boron doped polycrystalline Si_xGe_1-xSANGANERIA, M; GRIDER, D. T; ÖZTÜRK, M. C et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 61-64, issn 0361-5235Conference Paper

Ultraviolet laser-assisted surface treatment of InP with phosphine gasSUGINO, T; ITOH, H; BOOYASIRIKOOL, A et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 99-104, issn 0361-5235Conference Paper

Anneal treatment studies of heavily boron-doped siliconBRUCE, D. M.SPIE proceedings series. 1997, pp 270-275, isbn 0-8194-2655-5Conference Paper

Growth and crystallinity of electroformed nickel structuresCHANG, S.-C; EDENS, J.SPIE proceedings series. 1997, pp 100-109, isbn 0-8194-2655-5Conference Paper

Yield enhancement in micromechanical sensor fabrication using statistical process controlBORENSTEIN, J. T; PREBLE, D. M.SPIE proceedings series. 1997, pp 276-283, isbn 0-8194-2655-5Conference Paper

Photoelectric measurement and study of diamond-like carbon thin filmsROFAN, R; BOWER, R; KELLY, P et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 115-117, issn 0361-5235Conference Paper

Automotive applications for micromachiningSPARKS, D. R; CHANG, S.-C.SPIE proceedings series. 1997, pp 218-222, isbn 0-8194-2655-5Conference Paper

Ion sputter deposition of shape memory alloy films for microactuatorsDAVIES, S. T; TSUCHIYA, K.SPIE proceedings series. 1997, pp 160-167, isbn 0-8194-2655-5Conference Paper

PMOS integrated circuit fabrication using BF₃ plasma immersion ion implantationPICO, C. A; LIEBERMAN, M. A; CHEUNG, N. W et al.Journal of electronic materials. 1992, Vol 21, Num 1, pp 75-79, issn 0361-5235Conference Paper

Wide bandwidth silicon nitride membrane microphonesCUNNINGHAM, B. T; BERNSTEIN, J. J.SPIE proceedings series. 1997, pp 56-63, isbn 0-8194-2655-5Conference Paper

Balance-approach for mechanical properties test of micro fabricated structureXIONG, X; ZOU, Q; LU, D et al.SPIE proceedings series. 1997, pp 294-302, isbn 0-8194-2655-5Conference Paper